L. Bruchhaus

Sub-5nm FIB direct patterning of nanodevices

J. Giérak, Ali Madouri, Anne‐Laure Biance et al. · Microelectronic Engineering · 2007 · 143 citations

Engineering, Materials Engineering, Materials Science +12

Liquid metal alloy ion sources—An alternative for focussed ion beam technology

L. Bischoff, Paul Mazarov, L. Bruchhaus et al. · Applied Physics Reviews · 2016 · 87 citations

Natural Sciences, Materials Engineering, Materials Science +10

FIB carving of nanopores into suspended graphene films

Amy Morin, D. Lucot, Abdelkarim Ouerghi et al. · Microelectronic Engineering · 2012 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +12

Exploration of the ultimate patterning potential achievable with high resolution focused ion beams

J. Giérak, D. Mailly, Peter Hawkes et al. · Applied Physics A · 2004 · 46 citations

Natural Sciences, Materials Science, Physics +11

Exploration of the ultimate patterning potential achievable with focused ion beams

J. Giérak, Éric Le Bourhis, M. N. Merat Combes et al. · Microelectronic Engineering · 2005 · 39 citations

Natural Sciences, Materials Science, Physics +10