Publication | Closed Access
Exploration of the ultimate patterning potential achievable with high resolution focused ion beams
46
Citations
18
References
2004
Year
PhotonicsHigh ResolutionEngineeringPhysicsOptical PropertiesIon BeamsApplied PhysicsUltimate Patterning PotentialIon Beam PhysicsIon BeamIon EmissionElectron OpticBeam Optic
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