Concepedia

Publication | Closed Access

Sub-5nm FIB direct patterning of nanodevices

DOI

141

Citations

11

References

2007

Year

J. Giérak, Ali Madouri, Anne‐Laure Biance, Éric Le Bourhis, G. Patriarche, C. Ulysse, D. Lucot, Xavier Lafosse, L. Auvray, L. Bruchhaus,
Microelectronic Engineering

References

YearCitations

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