Pattern Transfer

Pattern Transfer is a microfabrication process in which a defined configuration from a mask or template is selectively imparted onto an underlying material layer through etching or deposition, thereby distinguishing it from related patterning methods by its reliance on physical or chemical modification to replicate nanoscale features with high fidelity.

1.1K

Publications

67.2K

Citations

4.4K

Authors

826

Institutions

Publications per year

2017–2026

142

Parents

Microfabrication

Children

Contact LithographyEtchingInterference LithographyLift-offLine-edge RoughnessMask Aligner TechnologyMultilayer Pattern TransferOverlay AlignmentPattern FidelityPattern Resolution

Publications

1.1K

Soft lithography for micro- and nanoscale patterning

Dong Qin, Younan Xia, George M. Whitesides · Nature Protocols · 2010 · 2.3K citations · Full text

Engineering, Materials Engineering, Materials Science +14

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.3K citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping

Andrés Castellanos-Gómez, Michele Buscema, Rianda Molenaar et al. · 2D Materials · 2014 · 2K citations

Natural Sciences, Materials Engineering, Materials Science +12

Block Copolymer Lithography: Periodic Arrays of ~10 <sup>11</sup> Holes in 1 Square Centimeter

Miri Park, Christopher Harrison, P. M. Chaikin et al. · Science · 1997 · 1.9K citations

Engineering, Materials Engineering, Materials Science +17

Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures

Mark P. Stoykovich, Marcus Müller, Sang Ouk Kim et al. · Science · 2005 · 957 citations

Natural Sciences, Materials Engineering, Materials Science +17

1–5 of 1.1K

Authors

4.4K

GM
George M. Whitesides
Harvard University, United States
19 publications · 4.6K citations
19
h-index
CG
C. Grant Willson
The University of Texas at Austin, United States
16 publications · 1.3K citations
15
h-index
LJ
L. Jay Guo
University of Michigan, United States
14 publications · 1.6K citations
14
h-index
SV
S. V. Sreenivasan
The University of Texas at Austin, United States
15 publications · 1.2K citations
13
h-index
RR
Ricardo Ruiz
Hitachi Global Storage Technologies (United States), United States
12 publications · 773 citations
12
h-index

1–5 of 4.4K

Institutions

826

1–8 of 826

Venues

Advanced Materials
62 publications · 5.5K citations
42
h-index
Applied Physics Letters
70 publications · 5.2K citations
35
h-index
Microelectronic Engineering
90 publications · 3.1K citations
32
h-index
Nano Letters
36 publications · 3.1K citations
30
h-index
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
64 publications · 3.2K citations
28
h-index

1–5