117
Publications
3.8K
Citations
34
H-Index
1996
Active since
Éric Le Bourhis is an author at Centre National de la Recherche Scientifique specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsMechanical EngineeringThin FilmsMechanics Of MaterialsMicrostructureSolid MechanicsNanotechnologyNanomaterials
Publications per year
1996–2023
117
117
Sub-5nm FIB direct patterning of nanodevices
J. Giérak, Ali Madouri, Anne‐Laure Biance et al. · Microelectronic Engineering · 2007 · 141 citations
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