G. Hobler

Monte Carlo simulation of two-dimensional implanted dopant distributions at mask edges

G. Hobler · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 128 citations

Mask Edges, Engineering, Applied Physics +2

Large fraction of crystal directions leads to ion channeling

K. Nordlund, Flyura Djurabekova, G. Hobler · Physical review. B./Physical review. B · 2016 · 101 citations · Full text

Engineering, Computational Chemistry, Molecular Dynamics +18

Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface

Warren J. MoberlyChan, David P. Adams, Michael J. Aziz et al. · MRS Bulletin · 2007 · 95 citations · Full text

Materials Science, Ion Implantation, Engineering +8

Roadmap for focused ion beam technologies

Katja Höflich, G. Hobler, Frances I. Allen et al. · Applied Physics Reviews · 2023 · 95 citations · Full text

Optical Materials, Engineering, Microscopy +18

Full three-dimensional simulation of focused ion beam micro/nanofabrication

Heung-Bae Kim, G. Hobler, Andreas Steiger et al. · Nanotechnology · 2007 · 78 citations

Engineering, Microscopy, Target Fabrication +17