T. H. P. Chang

Proximity effect in electron-beam lithography

T. H. P. Chang · Journal of Vacuum Science and Technology · 1975 · 533 citations

Engineering, Electrical Engineering, Computational Electromagnetics +9

Micromachining applications of a high resolution ultrathick photoresist

Kangsik Lee, N. LaBianca, S. A. Rishton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 380 citations

Engineering, Materials Engineering, Materials Science +17

Design and experimental technology for 0.1-µm gate-length low-temperature operation FET's

G.A. Sai-Halasz, M.R. Wordeman, D. P. Kern et al. · IEEE Electron Device Letters · 1987 · 136 citations

Engineering, Electrical Engineering, Materials Science +11

Multiple electron-beam lithography

T. H. P. Chang, Marián Maňkoš, Kim Y. Lee et al. · Microelectronic Engineering · 2001 · 122 citations

Electron-beam microcolumns for lithography and related applications

T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations

Engineering, Manufacturing Engineering, Materials Science +11