T. H. P. Chang

Proximity effect in electron-beam lithography

T. H. P. Chang · Journal of Vacuum Science and Technology · 1975 · 529 citations

Proximity Effect, Engineering, Electron-beam Lithography +12

Micromachining applications of a high resolution ultrathick photoresist

Kangsik Lee, N. LaBianca, S. A. Rishton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 379 citations

Engineering, Electron-beam Lithography, Microscopy +17

Design and experimental technology for 0.1-µm gate-length low-temperature operation FET's

G.A. Sai-Halasz, M.R. Wordeman, D. P. Kern et al. · IEEE Electron Device Letters · 1987 · 135 citations

Low-power Electronics, Device Modeling, Electrical Engineering +15

Multiple electron-beam lithography

T. H. P. Chang, Marián Maňkoš, Kim Y. Lee et al. · Microelectronic Engineering · 2001 · 122 citations

Materials Science, Engineering, Electron-beam Lithography +9

Electron-beam microcolumns for lithography and related applications

T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations

Materials Science, Engineering, Electron-beam Lithography +15