Multiple electron-beam lithography

Micromachining applications of a high resolution ultrathick photoresist

Kangsik Lee, N. LaBianca, S. A. Rishton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 380 citations

Engineering, Materials Engineering, Materials Science +17

Electron-beam microcolumns for lithography and related applications

T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations

Engineering, Manufacturing Engineering, Materials Science +11

Electron beam and scanning probe lithography: A comparison

Kathryn Wilder, C. F. Quate, Bhanwar Singh et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 94 citations

Engineering, Electrical Engineering, Materials Science +12

Electron-beam cell projection lithography: A new high-throughput electron-beam direct-writing technology using a specially tailored Si aperture

Y. Nakayama, Shinji Okazaki, Norio Saitou et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 73 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Electron beam lithography for 0.13 μm manufacturing

M. A. McCord · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 73 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14