L. P. Muray - Concepedia

Author

L. P. Muray

IBM Research - Thomas J. Watson Research Center

Also Known As

L P Muray, L. Muray, L. P. Muray, L.P. Muray, Larry P. Muray

Publications

609

Citations

H-Index

Concepts

All Affiliations

IBM Research - Thomas J. Watson Research Center Novel (United States)Applied Materials (United States)Cornell University University of Basel

About

L. P. Muray is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and microscopy.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	14	17	563
2	Applied Physics	14	16	547
3	Biomedical Engineering	3	3	56
4	Medicine	1	1	11
5	Chemical Engineering	1	1	24

L. P. Muray

Publications

593

Citations

H-Index

Page 1

	Year	Citations
Multiple electron-beam lithography T. H. P. Chang, Marián Maňkoš, Kim Y. Lee, Microelectronic Engineering Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicroscopy	2001	122
Arrayed miniature electron beam columns for high throughput sub-100 nm lithography T. H. P. Chang, D. P. Kern, L. P. Muray Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringProximity Effect CorrectionsElectron-beam LithographyMicroscopyMicro-optical Component	1992	89
Microminiaturization of electron optical systems T. H. P. Chang, D. P. Kern, L. P. Muray Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Optical MaterialsEngineeringElectron-beam LithographyMicroscopyElectron Diffraction	1990	72
Advances in arrayed microcolumn lithography L. P. Muray, J. P. Spallas, C. Stebler, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceMicrocolumn ArrayWafer Scale ProcessingEngineeringElectron-beam Lithography	2000	51
Thermal stability of uniform silver clusters prepared on oxidized silicon and aluminum surfaces by electron beam lithography in oxidizing and reducing ambients Mingxu Yang, Peter W. Jacobs, Chankeun Yoon, Catalysis Letters	1997	30
Oxygen processed field emission tips for microcolumn applications Hae Soung Kim, Mingzhu Yu, U. Staufer, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyMicroscopyField Emission TipsGlow Discharge	1993	24
New technique and analysis of accelerated electromigration life testing in multilevel metallizations L. P. Muray, L. C. Rathbun, E. D. Wolf Applied Physics Letters EngineeringCritical MetalElectrometallurgyCorrosionElectromigration Life	1988	23
Experimental evaluation of a scanning tunneling microscope-microlens system L. P. Muray, U. Staufer, E. Bassous, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringExperimental EvaluationTunneling MicroscopyMicrofabricationMicroscopy	1991	22
Miniature electron-optical columns T. H. P. Chang, D. P. Kern, L. P. Muray IEEE Transactions on Electron Devices Optical MaterialsEngineeringElectron-beam LithographyMicroscopyMicro-optical Component	1991	22
Sub- 100-nm lithography with miniature electron beam columns L. P. Muray, C. S. Silver, J. P. Spallas Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyMicroscopyIntegrated CircuitsMultilayer Ceramic Package	2006	20

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