L. P. Muray

Multiple electron-beam lithography

T. H. P. Chang, Marián Maňkoš, Kim Y. Lee et al. · Microelectronic Engineering · 2001 · 122 citations

Materials Science, Engineering, Electron-beam Lithography +9

Arrayed miniature electron beam columns for high throughput sub-100 nm lithography

T. H. P. Chang, D. P. Kern, L. P. Muray · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 89 citations

Engineering, Proximity Effect Corrections, Electron-beam Lithography +17

Microminiaturization of electron optical systems

T. H. P. Chang, D. P. Kern, L. P. Muray · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 72 citations

Optical Materials, Engineering, Electron-beam Lithography +20

Advances in arrayed microcolumn lithography

L. P. Muray, J. P. Spallas, C. Stebler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 51 citations

Materials Science, Microcolumn Array, Wafer Scale Processing +15

Thermal stability of uniform silver clusters prepared on oxidized silicon and aluminum surfaces by electron beam lithography in oxidizing and reducing ambients

Mingxu Yang, Peter W. Jacobs, Chankeun Yoon et al. · Catalysis Letters · 1997 · 30 citations