Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 51 citations · 7 references
EngineeringElectrical EngineeringElectronic MaterialsMicroelectronicsMicrofabricationColumn TechnologyIntegrated Circuit DesignIntegrated Circuit FabricationMems DesignMems FabricationMicrofabrication MaterialsArray IntegrationMicroscale Fabrication
A microcolumn array has been designed, fabricated, and tested. The 2×2 array has a 2 cm pitch and operates at 1 keV. Key components include vertical interconnects, silicon low-distortion octupole deflectors, miniature long-range flexure-based tip positioners, and low-power thermal field emitters. Initial results show no observable crosstalk between columns during simultaneous operation at a 50 MHz beam blanking rate. Preliminary lithography results are presented.
7
Electron-beam microcolumns for lithography and related applications
T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations
Engineering, Manufacturing Engineering, Materials Science +11
Experimental evaluation of a 20×20 mm footprint microcolumn
E. Kratschmer, H. S. Kim, M. G. R. Thomson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 62 citations
Engineering, Electrical Engineering, Electronic Materials +14