Statistics
Publications
53
Citations
1.8K
H-Index
26
Active since
1972
Mingzhu Yu is an author at Shenzhen University specializing in engineering, applied physics, and logistics.
Publications per year
1972–2024
53
53
Electron-beam microcolumns for lithography and related applications
T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations
Materials Science, Engineering, Electron-beam Lithography +15
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