53
Publications
1.8K
Citations
26
H-Index
1972
Active since
Mingzhu Yu is an author at Shenzhen University specializing in engineering, applied physics, and logistics.
Top concepts
EngineeringApplied PhysicsLogisticsBusinessOperations ResearchPhysicsMaterial ScienceMicroelectronicsElectrical EngineeringMicroscopy
Publications per year
1972–2024
53
53
Electron-beam microcolumns for lithography and related applications
T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations
Materials Science, Engineering, Electron-beam Lithography +15
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