19
Publications
670
Citations
15
H-Index
1978
Active since
M. G. R. Thomson is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMicroscopyMicrofabricationElectrical EngineeringPhysicsInstrumentationMaterial ScienceNanotechnology
Publications per year
1978–2006
19
19
Electron-beam microcolumns for lithography and related applications
T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations
Materials Science, Engineering, Electron-beam Lithography +15
High performance 0.1 μm CMOS devices with 1.5 V power supply
Y. Taur, Shalom J. Wind, Y. J. Mii et al. · 2002 · 92 citations
Low-power Electronics, High Performance 0.1, Electrical Engineering +12
An electron-beam microcolumn with improved resolution, beam current, and stability
E. Kratschmer, H. S. Kim, M. G. R. Thomson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 63 citations
Optical Materials, Engineering, Electron-beam Lithography +16
Experimental evaluation of a 20×20 mm footprint microcolumn
E. Kratschmer, H. S. Kim, M. G. R. Thomson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 62 citations
Electron Emitter, Engineering, Electron-beam Lithography +21
Electron beam technology—SEM to microcolumn
T. H. P. Chang, M. G. R. Thomson, Mingzhu Yu et al. · Microelectronic Engineering · 1996 · 44 citations · Full text
Materials Science, Electron Beam Technology—sem, Electron Probe Systems +14
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