1
Publications
63
Citations
1
H-Index
1995
Active since
Affiliations
H. S. Kim is an author at IBM Research - Thomas J. Watson Research Center specializing in nanotechnology, photonics, and microfabrication.
Top concepts
PhysicsPhotonicsMicroscopyEngineeringNanotechnologyApplied PhysicsIon Beam PhysicsMicroelectronicsMicrofabricationOptical Materials
Publications per year
1995–1995
1
1
An electron-beam microcolumn with improved resolution, beam current, and stability
E. Kratschmer, H. S. Kim, M. G. R. Thomson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 63 citations
Optical Materials, Engineering, Electron-beam Lithography +16
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