C. Stebler

Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems

P-A Clerc, L. Dellmann, François Gretillat et al. · Journal of Micromechanics and Microengineering · 1998 · 55 citations · Full text

Advances in arrayed microcolumn lithography

L. P. Muray, J. P. Spallas, C. Stebler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 51 citations

Materials Science, Microcolumn Array, Wafer Scale Processing +15

Fabrication of a silicon-Pyrex-silicon stack by a.c. anodic bonding

M. Despont, H.S. Gross, F. Arrouy et al. · Sensors and Actuators A Physical · 1996 · 34 citations

Materials Science, Engineering, Microfabrication +6

Microfabrication of lenses of a miniaturized electron column

M. Despont, U. Staufer, C. Stebler et al. · Microelectronic Engineering · 1995 · 22 citations

Engineering, Miniaturized Electron Column, Microfabrication +6

Experimental evaluation of arrayed microcolumn lithography

L. P. Muray, K. Y. Lee, J. P. Spallas et al. · Microelectronic Engineering · 2000 · 16 citations

Engineering, Experimental Evaluation, Electron-beam Lithography +6