Concepedia

Publication | Open Access

Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems

DOIFull Paper Access

55

Citations

27

References

1998

Year

P-A Clerc, L. Dellmann, François Gretillat, M.-A. Grétillat, P.-F. Indermühle, S. Jeanneret, Ph. Luginbuhl, C. Marxer, T L Pfeffer, G.-A. Racine,
Journal of Micromechanics and Microengineering

Abstract

SAMLAB

References

YearCitations

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