P.-F. Indermühle

CVD diamond probes for nanotechnology

Ph. Niedermann, W. Hänni, D. Morel et al. · Applied Physics A · 1998 · 67 citations · Full text

Diamond-like Carbon, Engineering, Physics +7

Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems

P-A Clerc, L. Dellmann, François Gretillat et al. · Journal of Micromechanics and Microengineering · 1998 · 55 citations · Full text

AFM imaging with an xy-micropositioner with integrated tip

P.-F. Indermühle, V.P. Jaecklin, Juergen Brügger et al. · Sensors and Actuators A Physical · 1995 · 47 citations · Full text

Engineering, Microscopy, Microfabrication +7

Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

P.-F. Indermühle, G. Schürmann, G.-A. Racine et al. · Sensors and Actuators A Physical · 1997 · 39 citations · Full text

Engineering, Parallel Afm Applications, Microfabrication +10

Atomic force microscopy using cantilevers with integrated tips and piezoelectric layers for actuation and detection

P.-F. Indermühle, G. Schürmann, G.-A. Racine et al. · Journal of Micromechanics and Microengineering · 1997 · 28 citations · Full text

Atomic Force Microscopy, Engineering, Microscopy +19