Publication | Open Access

Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

EngineeringParallel Afm ApplicationsMicrofabricationMechanical DesignMechanical EngineeringActuationPiezoelectric ElementsPiezoelectricityPiezoelectric MaterialMicroactuatorInstrumentationIntegrated Sharp TipsMicro-electromechanical System