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Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators
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1995
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EngineeringMicroscopyMechanical EngineeringMicro-electromechanical SystemSoft RoboticsAtomic Force MicroscopePiezoelectric ActuatorsPiezoelectric MaterialInstrumentationPiezoelectric Zinc OxideMaterials ScienceMechanical DesignIntegrated Piezoresistive SensorsZno ActuatorPiezoelectricityOptical SensorsMicrofabricationScanning Probe MicroscopyApplied PhysicsNano Electro Mechanical SystemScanning Force Microscopy
The cantilevers integrate a piezoresistive silicon sensor and a piezoelectric ZnO actuator, with the sensor detecting strain to provide feedback for the actuator. We fabricated and operated two cantilevers in parallel, enabling simultaneous recording of two independent AFM images in constant force mode, with the ZnO actuator delivering over 4 µm deflection at low frequencies and over 30 µm at resonance.
We have fabricated and operated two cantilevers in parallel in a new mode for imaging with the atomic force microscope (AFM). The cantilevers contain both an integrated piezoresistive silicon sensor and an integrated piezoelectric zinc oxide (ZnO) actuator. The integration of sensor and actuator on a single cantilever allows us to simultaneously record two independent AFM images in the constant force mode. The ZnO actuator provides over 4 μm of deflection at low frequencies (dc) and over 30 μm deflection at the first resonant frequency. The piezoresistive element is used to detect the strain and provide the feedback signal for the ZnO actuator.