J. Greschner

Micromachined silicon sensors for scanning force microscopy

Olaf Wolter, Thomas Bayer, J. Greschner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 294 citations

Single Crystal Silicon, Engineering, Soft Robotics +12

Scanning force microscopy with micromachined silicon sensors

M. Nonnenmacher, J. Greschner, Olaf Wolter et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 112 citations

Sfm Measurements, Engineering, Microscopy +19

Batch fabricated sensors for magnetic force microscopy

Peter Grütter, D. Rugar, H. J. Mamin et al. · Applied Physics Letters · 1990 · 92 citations

Magnetic Properties, Engineering, Microscopy +18

Low temperature etching of Si in high density plasma using SF6/O2

Johann W. Bartha, J. Greschner, M. Puech et al. · Microelectronic Engineering · 1995 · 91 citations

Materials Engineering, Materials Science, High Density +9

Magnetic force microscopy with batch-fabricated force sensors

Peter Grütter, D. Rugar, H. J. Mamin et al. · Journal of Applied Physics · 1991 · 42 citations

Magnetic Properties, Engineering, Microscopy +17