Statistics
Publications
8
Citations
680
H-Index
8
Active since
1982
Affiliations
J. Greschner is an author at IBM (United States) specializing in materials science, engineering, and force sensors.
Publications per year
1982–2008
8
8
Low temperature etching of Si in high density plasma using SF6/O2
Johann W. Bartha, J. Greschner, M. Puech et al. · Microelectronic Engineering · 1995 · 93 citations
Batch fabricated sensors for magnetic force microscopy
Peter Grütter, D. Rugar, H. J. Mamin et al. · Applied Physics Letters · 1990 · 92 citations
Magnetic force microscopy with batch-fabricated force sensors
Peter Grütter, D. Rugar, H. J. Mamin et al. · Journal of Applied Physics · 1991 · 42 citations
Natural Sciences, Materials Engineering, Materials Science +17
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