Concepedia

Microcantilever Design

Microcantilever Design is a specialized methodology within MEMS Design that entails the systematic development and optimization of microscale cantilever structures for sensing, actuation, or manipulation applications, distinguished by its focus on dimensional scaling, material properties, and resonance behavior unique to microfabricated environments.

764

Publications

34.4K

Citations

2.6K

Authors

646

Institutions

Publications per year

2017–2026

105

Parents

Publications

764

Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications

Mo Li, Hong X. Tang, M. L. Roukes · Nature Nanotechnology · 2007 · 1K citations

, , +14

Mechanical parametric amplification and thermomechanical noise squeezing

D. Rugar, Peter Grütter · Physical Review Letters · 1991 · 633 citations · Full text

, , +15

Cantilever-like micromechanical sensors

Anja Boisen, Søren Dohn, Stephan Sylvest Keller et al. · Reports on Progress in Physics · 2011 · 555 citations

, , +17

Single virus particle mass detection using microresonators with nanoscale thickness

Amit Gupta, Demir Akin, Rashid Bashir · Applied Physics Letters · 2004 · 541 citations

, , +17

A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout

F. Battiston, J.-P. Ramseyer, H.P. Lang et al. · Sensors and Actuators B Chemical · 2001 · 448 citations

, , +17

1–5 of 764

Authors

2.6K

  1. TT
    Thomas Thundat

    Oak Ridge National Laboratory, United States

    31 publications · 1.9K citations

    22

    h-index

  2. AB
    Anja Boisen

    Technical University of Denmark, Denmark

    16 publications · 1.6K citations

    15

    h-index

  3. WP
    William P. King

    University of Illinois Urbana-Champaign, United States

    20 publications · 886 citations

    15

    h-index

  4. HJ
    Hai‐Feng Ji

    Drexel University, United States

    18 publications · 974 citations

    15

    h-index

  5. IW
    Ivo W. Rangelow

    Technische Universität Ilmenau, Germany

    13 publications · 341 citations

    12

    h-index

1–5 of 2.6K

Institutions

646

  1. Oak Ridge National Laboratory

    Oak Ridge, United States

    25 h-index

    107 publications

    7.9K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    21 h-index

    182 publications

    5.9K citations

  3. Chinese Academy of Sciences

    Beijing, China

    19 h-index

    130 publications

    4.3K citations

  4. IBM Research - Zurich

    Rüschlikon, Switzerland

    17 h-index

    91 publications

    12.9K citations

  5. Georgia Institute of Technology

    Atlanta, United States

    17 h-index

    44 publications

    2K citations

  6. University of Basel

    Basel, Switzerland

    16 h-index

    86 publications

    13.2K citations

  7. University of Tennessee at Knoxville

    Knoxville, United States

    15 h-index

    51 publications

    3.1K citations

  8. Technical University of Denmark

    Kongens Lyngby, Denmark

    15 h-index

    68 publications

    5.9K citations

1–8 of 646

Venues

  1. Sensors and Actuators A Physical

    97 publications · 3.6K citations

    34

    h-index

  2. Applied Physics Letters

    49 publications · 3.4K citations

    31

    h-index

  3. Sensors and Actuators B Chemical

    52 publications · 2.7K citations

    29

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 25 publications · 892 citations

    19

    h-index

  5. Microelectronic Engineering

    34 publications · 908 citations

    18

    h-index

1–5