Publication | Closed Access
Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications
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Citations
33
References
2007
Year
Electrical EngineeringEngineeringSensorsMicrofabricationNano Electro Mechanical SystemHigh-frequency ApplicationsUltra-sensitive Nems-based CantileversSensor DesignInstrumentationSensor TechnologyMicro-electromechanical System
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