Publication | Closed Access
Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern
50
Citations
0
References
1996
Year
Feedback MotionEngineeringMicroscopyForce Microscopy ObservationMechanical EngineeringMicroactuatorMicro-electromechanical SystemPzt Thin FilmMicromachinesMechanicsMaterials ScienceCantilever ActuationMicrostructureMicrofabricationScanning Probe MicroscopyMaterials CharacterizationApplied PhysicsMechanical SystemsScanning Force Microscopy
An atomic force microscope cantilever with PZT thin film with pyramidal stylus was used for actuation of feedback motion. The maximum stroke of the cantilever was more than 1 μm within a frequency range from direct current up to natural resonant frequency, e.g., 28.48 kHz. An image of a pit of a compact disk with a depth of 100 nm was successfully obtained using only cantilever actuation in a vertical direction.