Concepedia

Publication | Closed Access

Experimental evaluation of arrayed microcolumn lithography

DOI

16

Citations

5

References

2000

Year

L. P. Muray, K. Y. Lee, J. P. Spallas, Marián Maňkoš, Yautzong Hsu, Max Gmür, H.S. Gross, C. Stebler, T. H. P. Chang
Microelectronic Engineering

References

YearCitations

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