J. P. Spallas

Field emitter array mask patterning using laser interference lithography

J. P. Spallas, A. M. Hawryluk, D. R. Kania · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 73 citations

Engineering, Electrical Engineering, Materials Science +17

Advances in arrayed microcolumn lithography

L. P. Muray, J. P. Spallas, C. Stebler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 51 citations

Engineering, Electrical Engineering, Electronic Materials +10

Fabrication of sub-0.5 μm diameter cobalt dots on silicon substrates and photoresist pedestals on 50 cm×50 cm glass substrates using laser interference lithograph

J. P. Spallas, R. D. Boyd, J A Britten et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 39 citations

Engineering, Electrical Engineering, Materials Science +11

A manufacturable miniature electron beam column

J. P. Spallas, C. S. Silver, Lawrence P. Muray et al. · Microelectronic Engineering · 2006 · 24 citations

Engineering, Manufacturing Engineering, Physics +8

Self-aligned silicon field emission cathode arrays formed by selective, lateral thermal oxidation of silicon

J. P. Spallas, John H. Das, Noel C. MacDonald · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 22 citations

Engineering, Materials Engineering, Materials Science +16