Lawrence P. Muray

Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures

Erik H. Anderson, Volker Boegli, Lawrence P. Muray · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 61 citations

Engineering, Electron-beam Lithography, Analog Design +16

A manufacturable miniature electron beam column

J. P. Spallas, C. S. Silver, Lawrence P. Muray et al. · Microelectronic Engineering · 2006 · 24 citations

Electrical Engineering, Engineering, Electron-beam Lithography +7

Modular MEMS design and fabrication for an 80 x 80 transparent optical cross-connect switch

A. Fernandez, Bryan P. Staker, Windsor E. Owens et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations

Optical Materials, Engineering, Device Integration +23

Developments in low‐voltage microscopy instrumentation

Lawrence P. Muray · Scanning · 2011 · 12 citations

Electrostatic Immersion, Engineering, Electron-beam Lithography +17

On the limits of miniature electron column technology

Lawrence P. Muray, J. P. Spallas, Dan Meisburger · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations