Concepedia

Volker Boegli

VB

8

Publications

299

Citations

8

H-Index

1990

Active since

Affiliations

Lawrence Berkeley National Laboratory(Current)

Massachusetts Institute of Technology

IBM Research - Thomas J. Watson Research Center

Volker Boegli is an author at Lawrence Berkeley National Laboratory specializing in engineering, applied physics, and microelectronics.

Top concepts

Publications per year

1990–2004

8

Publications

8

Electron-beam-based photomask repair

Klaus Edinger, Hans Becht, Johannes Bihr et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 78 citations

, , +15

Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures

Erik H. Anderson, Volker Boegli, Lawrence P. Muray · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 61 citations

, , +16

Magnification of mask fabricated fibre Bragg gratings

John D. Prohaska, E. Snitzer, S. A. Rishton et al. · Electronics Letters · 1993 · 53 citations

, , +12

Spatial-phase-locked electron-beam lithography: Initial test results

J. Mariano Ferrera, Vincent V. Wong, S. A. Rishton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 32 citations

, , +20

Metrology of electron-beam lithography systems using holographically produced reference samples

Erik H. Anderson, Volker Boegli, Mark L. Schattenburg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 24 citations

, , +16

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