J. Mariano Ferrera

Photonic-bandgap microcavities in optical waveguides

James Foresi, Pierre R. Villeneuve, J. Mariano Ferrera et al. · Nature · 1997 · 961 citations

Engineering, Materials Engineering, Materials Science +14

Analyses of vector Gaussian beam propagation and the validity of paraxial and spherical approximations

Carl G. Chen, Paul T. Konkola, J. Mariano Ferrera et al. · Journal of the Optical Society of America A · 2002 · 128 citations

Natural Sciences, Physics, Electromagnetics +16

Fabrication of 200 nm period nanomagnet arrays using interference lithography and a negative resist

M. Farhoud, J. Mariano Ferrera, Anthony Lochtefeld et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +11

Analysis of distortion in interferometric lithography

J. Mariano Ferrera, Mark L. Schattenburg, Henry I. Smith · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 51 citations

Natural Sciences, Physics, Metrology +15

Sub-100 nm metrology using interferometrically produced fiducials

Mark L. Schattenburg, C. Chen, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 50 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15