Concepedia

C. Chen

CC

1

Publications

50

Citations

1

H-Index

1999

Active since

Affiliations

Massachusetts Institute of Technology(Current)

C. Chen is an author at Massachusetts Institute of Technology specializing in quality metrics, optical properties, and instrumentation.

Top concepts

MetrologyMicroscopyEngineeringInterferometryTime MetrologyApplied PhysicsInstrumentationQuality MetricsMaterial ScienceMicrofabrication

Publications per year

1999–1999

1

Publications

1

Sub-100 nm metrology using interferometrically produced fiducials

Mark L. Schattenburg, C. Chen, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 50 citations

Engineering, Electron-beam Lithography, Microscopy +18

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