121
Publications
4.8K
Citations
39
H-Index
1978
Active since
Mark L. Schattenburg is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsOptical PropertiesMaterial ScienceMicrofabricationPhysicsOptical MaterialsX-ray ImagingPhotonicsSynchrotron Radiation
Publications per year
1978–2023
121
121
C. R. Canizares, John E. Davis, Daniel Dewey et al. · Publications of the Astronomical Society of the Pacific · 2005 · 334 citations · Full text
Diffraction of Atoms by a Transmission Grating
David W. Keith, Mark L. Schattenburg, Henry I. Smith et al. · Physical Review Letters · 1988 · 198 citations
Large-area achromatic interferometric lithography for 100 nm period gratings and grids
T. A. Savas, Mark L. Schattenburg, J. M. Carter et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 171 citations
Optical Materials, Engineering, Electron-beam Lithography +22
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1–5 of 121