3
Publications
296
Citations
3
H-Index
1992
Active since
Affiliations
J. M. Carter is an author at Massachusetts Institute of Technology specializing in optical materials, optoelectronics, and nanophotonics.
Top concepts
PhotonicsEngineeringNanophotonicsApplied PhysicsOptoelectronicsOptical MaterialsOptical PropertiesPhotonic MetrologyPhysicsInterferometry
Publications per year
1992–1996
3
3
Large-area achromatic interferometric lithography for 100 nm period gratings and grids
T. A. Savas, Mark L. Schattenburg, J. M. Carter et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 171 citations
Optical Materials, Engineering, Electron-beam Lithography +22
Achromatic interferometric lithography for 100-nm-period gratings and grids
T. A. Savas, Satyen N. Shah, Mark L. Schattenburg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 111 citations
Large-area Coherent Gratings, Photonics, Optical Materials +13
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