1
Publications
111
Citations
1
H-Index
1995
Active since
Affiliations
Satyen N. Shah is an author at Massachusetts Institute of Technology specializing in engineering, photonic metrology, and applied physics.
Top concepts
PhotonicsEngineeringNanophotonicsApplied PhysicsOptical SystemsOptoelectronicsOptical MaterialsOptical PropertiesPhotonic Metrology
Publications per year
1995–1995
1
1
Achromatic interferometric lithography for 100-nm-period gratings and grids
T. A. Savas, Satyen N. Shah, Mark L. Schattenburg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 111 citations
Large-area Coherent Gratings, Photonics, Optical Materials +13
Rows per page
1–1 of 1