Concepedia

Patrick N. Everett

PN

11

Publications

216

Citations

10

H-Index

1970

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Mitre (United States)

Patrick N. Everett is an author at Massachusetts Institute of Technology specializing in engineering, microscopy, and applied physics.

Top concepts

Publications per year

1970–2005

11

Publications

11

Sub-100 nm metrology using interferometrically produced fiducials

Mark L. Schattenburg, C. Chen, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 50 citations

, , +18

Interferometric-spatial-phase imaging for six-axis mask control

Euclid E. Moon, Lynn Chen, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 31 citations

, , +25

Application of interferometric broadband imaging alignment on an experimental x-ray stepper

Euclid E. Moon, Jawoong Lee, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 23 citations

, , +22

Immunity to signal degradation by overlayers using a novel spatial-phase-matching alignment system

Euclid E. Moon, Patrick N. Everett, Henry I. Smith · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 18 citations

, , +14

Dynamic alignment control for fluid-immersion lithographies using interferometric-spatial-phase imaging

Euclid E. Moon, Mark K. Mondol, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 18 citations

, , +21

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