Concepedia

Lynn Chen

LC

2

Publications

46

Citations

2

H-Index

2003

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Lynn Chen is an author at Massachusetts Institute of Technology specializing in interferometry, instrumentation, and optical properties.

Top concepts

MicroscopyEngineeringNanophotonicsInterferometryInstrumentationOrganic PhotonicsOptical PropertiesPhotonic MetrologyHealthPhysics

Publications per year

2003–2004

2

Publications

2

Interferometric-spatial-phase imaging for six-axis mask control

Euclid E. Moon, Lynn Chen, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 31 citations

Engineering, Microscopy, Optical Testing +25

Nanometer gap measurement and verification via the chirped-Talbot effect

Euclid E. Moon, Lynn Chen, Patrick N. Everett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 15 citations

Gap Measurement, Engineering, Microscopy +20

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