Carl G. Chen

Analyses of vector Gaussian beam propagation and the validity of paraxial and spherical approximations

Carl G. Chen, Paul T. Konkola, J. Mariano Ferrera et al. · Journal of the Optical Society of America A · 2002 · 127 citations

Numerical Analysis, Engineering, Wave Optic +18

Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders

Ralf K. Heilmann, Carl G. Chen, Paul T. Konkola et al. · Nanotechnology · 2004 · 82 citations

Engineering, Electron-beam Lithography, Microscopy +25

Nanometer-level repeatable metrology using the Nanoruler

Paul T. Konkola, Carl G. Chen, Ralf K. Heilmann et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 59 citations

Nanometer-level Repeatable Metrology, Engineering, Measurement +22

Nanometer-accurate grating fabrication with scanning beam interference lithography

Carl G. Chen, Paul T. Konkola, Ralf K. Heilmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 57 citations

Materials Science, Engineering, Electron-beam Lithography +15

Image metrology and system controls for scanning beam interference lithography

Carl G. Chen, Paul T. Konkola, Ralf K. Heilmann et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 54 citations

Engineering, Electron-beam Lithography, Microscopy +24