Concepedia

Paul T. Konkola

PT

Statistics

Publications

16

Citations

654

H-Index

13

Active since

1999

Affiliations

Massachusetts Institute of Technology(Current)

Paul T. Konkola is an author at Massachusetts Institute of Technology specializing in interference lithography, engineering, and interferometry.

Publications per year

1999–2004

16

Publications

16

Analyses of vector Gaussian beam propagation and the validity of paraxial and spherical approximations

Carl G. Chen, Paul T. Konkola, J. Mariano Ferrera et al. · Journal of the Optical Society of America A · 2002 · 128 citations

Natural Sciences, Physics, Electromagnetics +16

Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders

Ralf K. Heilmann, Carl G. Chen, Paul T. Konkola et al. · Nanotechnology · 2004 · 82 citations

Engineering, Manufacturing Engineering, Materials Characterization +12

Nanometer-level repeatable metrology using the Nanoruler

Paul T. Konkola, Carl G. Chen, Ralf K. Heilmann et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 60 citations

Engineering, Electrical Engineering, Metrology +15

Nanometer-accurate grating fabrication with scanning beam interference lithography

Carl G. Chen, Paul T. Konkola, Ralf K. Heilmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 58 citations

Engineering, Electrical Engineering, Metrology +12

Image metrology and system controls for scanning beam interference lithography

Carl G. Chen, Paul T. Konkola, Ralf K. Heilmann et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 55 citations

Natural Sciences, Physics, Metrology +13

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