82
Publications
2.3K
Citations
28
H-Index
1996
Active since
Ralf K. Heilmann is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceOptical PropertiesX-ray ImagingSynchrotron RadiationInstrumentationPhysicsOptical MaterialsX-ray Spectroscopy
Publications per year
1996–2023
82
82
Nanometer-level repeatable metrology using the Nanoruler
Paul T. Konkola, Carl G. Chen, Ralf K. Heilmann et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 59 citations
Nanometer-level Repeatable Metrology, Engineering, Measurement +22
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1–5 of 82