Concepedia
Statistics
Publications
2
Citations
91
H-Index
Active since
2003
Hans Becht is an author specializing in mask repair, electron beam lithography, and quartz.
Publications per year
2003–2004
Electron-beam-based photomask repair
Klaus Edinger, Hans Becht, Johannes Bihr et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 78 citations
Engineering, Materials Engineering, Materials Science +15
A novel electron-beam-based photomask repair tool
Klaus Edinger, Hans Becht, Rainer Becker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 13 citations
Engineering, Electrical Engineering, Materials Science +17
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