37
Publications
1.5K
Citations
20
H-Index
1990
Active since
Klaus Edinger is an author at University of Maryland, College Park specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicroelectronicsMicroscopyNanotechnologyInstrumentationMicrofabricationElectrical Engineering
Publications per year
1990–2020
37
37
Nanoscale patterning of self-assembled monolayers with electrons
Armin Gölzhäuser, Volker Stadler, Wolfgang Eck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 138 citations
Engineering, Electron-beam Lithography, Pattern Transfer +19
Rows per page
1–5 of 37