Rainer Becker - Concepedia

Author

Rainer Becker

Also Known As

R. Becker, Rainer Becker

Publications

Citations

H-Index

Concepts

All Affiliations

Rainer Becker is an author at Mission College specializing in applied physics, engineering, and instrumentation.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	33
2	Applied Physics	2	2	33
3	Chemical Engineering	1	1	20
4	Computer Engineering	1	1	13
5	Electrical Engineering	1	1	13

Rainer Becker

Publications

Citations

H-Index

Page 1

	Year	Citations
Gas assisted focused electron beam induced etching of alumina T. Bret, B. Afra, Rainer Becker, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceMaterials EngineeringChemical EngineeringAluminium NitrideFocused Electron Beam	2009	20
A novel electron-beam-based photomask repair tool Klaus Edinger, Hans Becht, Rainer Becker, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyElectron OpticBeam Lithography	2003	13

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