Dan Meisburger is an author at Stanford University specializing in charge transport, electrical insulation, and electrical engineering.
Top concepts
EngineeringApplied PhysicsSurface ScienceCharge TransportMaterial ScienceElectrical InsulationElectrical EngineeringThin FilmsSemiconductorsMicroelectronics
Publications per year
1999–2014
3
3
Charging and discharging of electron beam resist films
Min Bai, R. F. W. Pease, C. Tanasa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 43 citations
Materials Science, Materials Engineering, Electrical Engineering +14
Electron beam induced conductivity in poly(methylmethacrylate) and SiO2 thin films
Min Bai, R. F. W. Pease, Dan Meisburger · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 13 citations
Engineering, Thin Film Process Technology, Silicon On Insulator +19
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