Concepedia

R. D. Boyd

RD

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Publications

1

Citations

39

H-Index

1

Active since

1996

Affiliations

Lawrence Livermore National Laboratory(Current)

R. D. Boyd is an author at Lawrence Livermore National Laboratory specializing in single-crystal silicon, materials science, and engineering.

Publications per year

1996–1996

1

Publications

1

Fabrication of sub-0.5 μm diameter cobalt dots on silicon substrates and photoresist pedestals on 50 cm×50 cm glass substrates using laser interference lithograph

J. P. Spallas, R. D. Boyd, J A Britten et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 39 citations

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