K. Y. Lee - Concepedia

Author

K. Y. Lee

Also Known As

K. Y. Lee, K.Y. Lee

Publications

Citations

H-Index

Concepts

All Affiliations

K. Y. Lee is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, engineering, and microfluidics.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	37
2	Applied Physics	1	1	21
3	Biomedical Engineering	1	1	16
4	Materials Science	1	1	21
5	Microelectronics	1	1	21

K. Y. Lee

Publications

Citations

H-Index

Page 1

	Year	Citations
High aspect ratio aligned multilayer microstructure fabrication K. Y. Lee, S. A. Rishton, T. H. P. Chang Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringMicro-optical ComponentWafer Scale ProcessingBeam LithographyPyrextm Glass	1994	21
Experimental evaluation of arrayed microcolumn lithography L. P. Muray, K. Y. Lee, J. P. Spallas, Microelectronic Engineering EngineeringExperimental EvaluationElectron-beam LithographyMicroscopyMicrofabrication	2000	16

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