2
Publications
37
Citations
2
H-Index
1994
Active since
Affiliations
K. Y. Lee is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, engineering, and microfluidics.
Top concepts
EngineeringMicrofluidicsMicrofabricationMicroscopy3D PrintingSelf-assemblyMicrostructureApplied PhysicsMaterial ScienceMicroelectronics
Publications per year
1994–2000
2
2
High aspect ratio aligned multilayer microstructure fabrication
K. Y. Lee, S. A. Rishton, T. H. P. Chang · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 21 citations
Engineering, Micro-optical Component, Wafer Scale Processing +16
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