Concepedia

Marián Maňkoš

MM

Statistics

Publications

27

Citations

835

H-Index

15

Active since

1990

Affiliations

Electron Optica (United States)(Current)

Lawrence Berkeley National Laboratory

Applied Materials (United States)

Arizona State University

Stanford University

Marián Maňkoš is an author at Electron Optica (United States) specializing in materials science, physics, and natural sciences.

ORCID

Publications per year

1990–2023

27

Publications

27

Multiple electron-beam lithography

T. H. P. Chang, Marián Maňkoš, Kim Y. Lee et al. · Microelectronic Engineering · 2001 · 122 citations

Thermal Adatoms on Si(001)

R. M. Tromp, Marián Maňkoš · Physical Review Letters · 1998 · 76 citations

, , +17

Fabrication of arrays of large step-free regions on Si(001)

So Tanaka, C. C. Umbach, J. M. Blakely et al. · Applied Physics Letters · 1996 · 74 citations

, , +17

A New Low Energy Electron Microscope

R. M. Tromp, Marián Maňkoš, M. C. Reuter et al. · Surface Review and Letters · 1998 · 69 citations

, , +17

Advances in arrayed microcolumn lithography

L. P. Muray, J. P. Spallas, C. Stebler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 51 citations

, , +10

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