Concepedia

Marián Maňkoš

MM

27

Publications

832

Citations

15

H-Index

1990

Active since

Affiliations

Electron Optica (United States)(Current)

Lawrence Berkeley National Laboratory

Applied Materials (United States)

Arizona State University

Stanford University

Marián Maňkoš is an author at Electron Optica (United States) specializing in applied physics, engineering, and microscopy.

Top concepts

EngineeringApplied PhysicsMicroscopyPhysicsMaterial ScienceOptoelectronicsMicroelectronicsMedicineMicrofabricationMagnetism

Publications per year

1990–2023

27

Publications

27

Multiple electron-beam lithography

T. H. P. Chang, Marián Maňkoš, Kim Y. Lee et al. · Microelectronic Engineering · 2001 · 122 citations

Materials Science, Engineering, Electron-beam Lithography +9

Thermal Adatoms on Si(001)

R. M. Tromp, Marián Maňkoš · Physical Review Letters · 1998 · 76 citations

Materials Science, Surface Characterization, Epitaxial Growth +14

Fabrication of arrays of large step-free regions on Si(001)

So Tanaka, C. C. Umbach, J. M. Blakely et al. · Applied Physics Letters · 1996 · 74 citations

Engineering, Ultrahigh Vacuum, Microscopy +20

A New Low Energy Electron Microscope

R. M. Tromp, Marián Maňkoš, M. C. Reuter et al. · Surface Review and Letters · 1998 · 69 citations

Engineering, Microscopy, Electron Diffraction +16

Advances in arrayed microcolumn lithography

L. P. Muray, J. P. Spallas, C. Stebler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 51 citations

Materials Science, Microcolumn Array, Wafer Scale Processing +15

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