Concepedia

Shinji Okazaki

SO

43

Publications

2.2K

Citations

22

H-Index

1987

Active since

Affiliations

Hitachi (Japan)(Current)

Association of Super-Advanced Electronics

Shinji Okazaki is an author at Hitachi (Japan) specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationOptical MaterialsOptical PropertiesElectrical EngineeringMaterial ScienceOptoelectronicsPhotonicsMicroscopy

Publications per year

1987–2017

43

Publications

43

Pushing the limits of lithography

Takashi Ito, Shinji Okazaki · Nature · 2000 · 862 citations

Engineering, Electron-beam Lithography, Beam Lithography +5

Resolution limits of optical lithography

Shinji Okazaki · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 155 citations · Full text

Photonics, Optical Materials, Engineering +15

High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution

Shinji Okazaki · Microelectronic Engineering · 2014 · 104 citations

Materials Science, Engineering, Electron-beam Lithography +15

Nano edge roughness in polymer resist patterns

Toshiyuki Yoshimura, Hiroshi Shiraishi, Jiro Yamamoto et al. · Applied Physics Letters · 1993 · 89 citations

Engineering, Electron-beam Lithography, Nanostructured Polymer +16

Correlation of Nano Edge Roughness in Resist Patterns with Base Polymers

Toshiyuki Yoshimura, Hiroshi Shiraishi, Jiro Yamamoto Jiro Yamamoto et al. · Japanese Journal of Applied Physics · 1993 · 87 citations

Materials Science, Materials Engineering, Base Polymers +15

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