Toshiyuki Yoshimura

Nano edge roughness in polymer resist patterns

Toshiyuki Yoshimura, Hiroshi Shiraishi, Jiro Yamamoto et al. · Applied Physics Letters · 1993 · 89 citations

Engineering, Materials Engineering, Materials Science +12

Correlation of Nano Edge Roughness in Resist Patterns with Base Polymers

Toshiyuki Yoshimura, Hiroshi Shiraishi, Jiro Yamamoto Jiro Yamamoto et al. · Japanese Journal of Applied Physics · 1993 · 88 citations

Natural Sciences, Materials Engineering, Materials Science +15

Magnetic nanoparticle array with perpendicular crystal magnetic anisotropy

C. Haginoya, Seiji Heike, Masayoshi Ishibashi et al. · Journal of Applied Physics · 1999 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +17

Acid-diffusion effect on nanofabrication in chemical amplification resist

Toshiyuki Yoshimura, Yoshinori Nakayama, Shinji Okazaki · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 52 citations

Engineering, Materials Engineering, Materials Science +14

Coulomb blockade in the inversion layer of a Si metal-oxide-semiconductor field-effect transistor with a dual-gate structure

Hideyuki Matsuoka, Tsuneo Ichiguchi, Toshiyuki Yoshimura et al. · Applied Physics Letters · 1994 · 40 citations

Engineering, Electrical Engineering, Materials Science +17