Statistics
Publications
814
Citations
39.9K
Authors
74
Location
Tokyo, Japan
814
Pushing the limits of lithography
Takashi Ito, Shinji Okazaki · Nature · 2000 · 884 citations
Kunihiko Iwamoto, Yuuichi Kamimuta, Arito Ogawa et al. · Applied Physics Letters · 2008 · 162 citations
1–5 of 814
74
27
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26
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25
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16
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15
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1–5 of 74