Concepedia

Kangsik Lee

KL

Statistics

Publications

3

Citations

517

H-Index

3

Active since

1995

Affiliations

Korea University(Current)

Kangsik Lee is an author at Korea University specializing in photoresists, deep ultraviolet lithography, and materials science.

Publications per year

1995–2024

3

Publications

3

Micromachining applications of a high resolution ultrathick photoresist

Kangsik Lee, N. LaBianca, S. A. Rishton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 380 citations

, , +17

Organometallic and coordinative photoresist materials for EUV lithography and related photolytic mechanisms

Ga‐Young Lim, Kangsik Lee, Suin Choi et al. · Coordination Chemistry Reviews · 2023 · 95 citations

, , +16

Multinuclear Tin-Based Macrocyclic Organometallic Resist for EUV Photolithography

Ga‐Young Lim, Kangsik Lee, Chawon Koh et al. · ACS Materials Au · 2024 · 42 citations · Full text

, , +13

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