Concepedia

Norio Saitou

NS

11

Publications

313

Citations

10

H-Index

1973

Active since

Affiliations

Hitachi (Japan)(Current)

Norio Saitou is an author at Hitachi (Japan) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPhysicsMicroscopyInstrumentationMicroelectronicsMicrofabricationHealthOptoelectronics

Publications per year

1973–2003

11

Publications

11

Electron-beam cell projection lithography: A new high-throughput electron-beam direct-writing technology using a specially tailored Si aperture

Y. Nakayama, Shinji Okazaki, Norio Saitou et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 73 citations

Electrical Engineering, Engineering, Electron-beam Lithography +13

Role of Ion Bombardment in Field Emission Current Instability

Hideo Todokoro, Norio Saitou, Shigehiko Yamamoto · Japanese Journal of Applied Physics · 1982 · 56 citations

Electrical Engineering, Gas Molecule Migration, Engineering +14

Fast proximity effect correction method using a pattern area density map

Fumio Murai, Haruo Yoda, Shinji Okazaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 41 citations

Proximity Effect, Image Analysis, Proximity Effect Correction +8

Electron-beam cell-projection lithography system

Y. Sakitani, Haruo Yoda, Hideo Todokoro et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 40 citations

Engineering, Vlsi Design, Electron-beam Lithography +19

Trajectory analysis of ions formed in the field emitter inter-electrode region

Norio Saitou · Surface Science · 1977 · 20 citations

Electrical Engineering, Inter-electrode Region, Engineering +11

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