Statistics
Publications
2
Citations
81
H-Index
2
Active since
1992
Affiliations
Hitachi (Japan)(Current)
Y. Sakitani is an author at Hitachi (Japan) specializing in engineering, computer engineering, and instrumentation.
Publications per year
1992–1992
2
2
Fast proximity effect correction method using a pattern area density map
Fumio Murai, Haruo Yoda, Shinji Okazaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 41 citations
Proximity Effect, Image Analysis, Proximity Effect Correction +8
1–2 of 2