Statistics
Publications
2
Citations
81
H-Index
2
Active since
1992
Affiliations
Hitachi (Japan)(Current)
Y. Sakitani is an author at Hitachi (Japan) specializing in very-large-scale integration layout, engineering, and proximity effect correction.
Publications per year
1992–1992
2
2
Electron-beam cell-projection lithography system
Y. Sakitani, Haruo Yoda, Hideo Todokoro et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 40 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
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