9
Publications
640
Citations
9
H-Index
1996
Active since
Affiliations
Kathryn Wilder is an author at Stanford University specializing in applied physics, engineering, and microfabrication.
Top concepts
EngineeringApplied PhysicsMicroscopyMicrofabricationNanotechnologyNanolithographyMaterial ScienceMicroelectronicsInstrumentationNanofabrication
Publications per year
1996–1999
9
9
Noncontact nanolithography using the atomic force microscope
Kathryn Wilder, C. F. Quate, D. Adderton et al. · Applied Physics Letters · 1998 · 111 citations
Electron beam and scanning probe lithography: A comparison
Kathryn Wilder, C. F. Quate, Bhanwar Singh et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 93 citations
Electrical Engineering, Engineering, Electron Microscopy +15
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